■B1517A (X4) – Four HRSMU – Up to 100V, 100mA force, 1fA current resolution

■B1520A – MFCMU – 1kHz to 5MHz, up to 100V DC bias with SMU GET QUg-12

■B1517A (X4) – Four HRSMU – Up to 100V, 100mA force, 1fA current resolution

■B1530A – WGFMU – Min 100ns pulse width, 10V peak-to-peak output, 5ns current or voltage measurement sampling speedET QUOTE

Product Overview
The Keysight B1500A (Agilent) Semiconductor Device Analyzer is a modular instrument with a ten-slot configuration that supports both IV and CV measurements and also fast high-voltage pulsing. Its familiar, Microsoft ® Windows ® user interface supports Agilent’s EasyEXPERT software, which provides a new, more intuitive task-oriented approach to device characterization. Because of its extremely low-current, low-voltage, and integrated capacitance measurement capabilities, the Keysight B1500A (Agilent) can be used for a wide range of semiconductor device characterization needs (IC-CAP supports the B1500A). It is also an excellent solution for non-volatile memory cell characterization and high-speed device characterization (including advanced NBTI measurement). 

Features and benefits of:

●Superior IV measurement performance: 0.1 fA / 0.5 µV measurement resolution

●Measurement features include single and multi-channel sweep, time sampling, list sweep, quasi-static CV (using the SMUs), direct control and arbitrary linear waveform generation (ALWG) GUI for the HV-SPGUs.

●Optional, integrated capacitance module supports CV measurements up to 5 MHz

●Optional positioner-based CV-IV switching solutions available with 0.5 µV voltage measurement resolution and 10 fA, 1 fA or 0.1 fA current measurement resolution capability

●Easy test automation with built-in semiautomatic wafer prober drivers and test sequencing without programming via the Quick Test mode

●Optional high-voltage semiconductor pulse generator unit (HV-SPGU) available with 10 ns programmable pulse widths and +/- 40 V (80 V peak-to-peak) output.

●Optional waveform generator/fast measurement unit (WGFMU) available with ALWG and fast current or voltage measurement capabilities.

●10 ns pulsed IV solution is available for characterizing high-k gate dielectric and SOI (silicon-on-insulator) transistors.

●A Classic Test mode is available to provide the look, feel, and terminology of the 4155/4156 interface while enhancing user interaction by taking full advantage of Microsoft ® Windows ® GUI features.

Key specifications of:

●General Features

●PC-based instrument with Windows ® XP Professional OS

●Single-box solution for current-voltage (IV), capacitance-voltage (CV), pulse generation, fast IV, and time-domain measurement.

●Ten module slots for source monitor units (SMUs) and other module types (MFCMU, HV-SPGU and WGFMU) *

●Offline data analysis and application test development via Desktop EasyEXPERT software

●Measurement Capabilities

■Supports current-voltage (IV) measurement to 0.1fA and 0.5µV

■Supports both quasi-static and medium-frequency capacitance-voltage (CV) measurement ]

■Supports accurate fast IV and time-domain measurement for a wide range of applications such as pulsed IV, NBTI and RTS measurement.

■Supports high voltage pulse generation (up to ±40 V) for high power and memory device testing.

Module Selection Guide: